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IEEE-NEMS 2015 <> Keynote Talks

Keynote Talks

Keynote Lecture 1: Construction and Emergent Functionality of Cellular Buildup Wet Robotics

Keisuke Morishimakeisuke2
Osaka University, Japan

Abstract: While previous works on cell-based devices for integrated chemical systems have focused on exploiting biochemical functions of cells, we demonstrated the direct utilization of on-board cells as microactuators converting chemical energy into mechanical energy and an environmentally robust hybrid (biotic–abiotic) robotic system that uses living components, called “Cellular Build Up Wet Nano Robotics”. This novel muscle-powered bioactuator successfully show autonomous beating at room temperature for a long time without maintenance. Experimental results suggest the possibility of constructing an environmentally robust hybrid wet robotic system with living components and open up a new science and technology, biorobotic approach, medical, environmental monitoring, agriculture and industrial application. To build up such a soft and wet machines will lead us an innovative fundamental change and produce a new principle and design to future man-made systems.

Biography: Dr. Keisuke Morishima is a Professor, Department of Mechanical Engineering, and The Center for Advanced Medical Engineering and Informatics, Osaka University, JAPAN; he graduated from Nagoya University where he received his PhD in Engineering in 1998. In 1997, he was JSPS Postdoctoral Research Fellow. From 1998 to 2001, he was a Postdoctoral Research Associate, Department of Chemistry, Stanford University, USA. He joined Kanagawa Academy of Science and Technology as a Research Scientist in 2001. In 2004, he was a Visiting Research Fellow at Lund Institute of Technology, Sweden. In 2005, he joined Department of Mechanical Systems Engineering, Tokyo University of Agriculture and Technology as an Associate Professor. In 2007, he joined Department of Bio-Mechanics and Intelligent Systems, Tokyo University of Agriculture and Technology, Japan. In 2011, he moved to Department of Mechanical Engineering, Osaka University as a Professor. He is mainly engaging in the research fields of Micro-Nano Robotics and its application to the micro-nanomanipulation, bio automation, BioMEMS, MicroTAS, microactuators, medical applications, living machine, soft & wet nano robotics, regenerative medicine. In recent years, he received 2009 Best Paper Award, The Robotics Society of Japan, 2009 The Young Scientists’ Prize, The Commendation for Science and Technology by the Minister of Education, Culture, Sports, Science and Technology, 2006 Young Scientist Award, Ando Foundation.


Keynote Lecture 2: Plastic Memories for Data Storage

Vellaisamy. A. L. Royroy2
City University of Hong Kong, Hong Kong, China

Abstract: The next-generation electronic systems are expected to be light, flexible and portable for applications in large area displays, integrated circuits (ICs), light emitting diodes (LEDs), radio frequency identification (RFID) tags, solar cells and so on. Memory is an essential part of advanced electronic systems for data processing, storage and communication. Among many types of memories such as ferroelectric, electret, resistive and floating gate [1 & 2] memories, floating gate flash memory devices have gained a great deal of attention due to the simple device structure, non-destructive read-out and controlled charge trap capacity [3-5]. In this presentation, solution processed or printed materials for flash memories on plastic substrates for data storage will be discussed.

Biography: Dr. Vellaisamy. A. L. Roy started his research on light emitting materials for his PhD, mainly on ESR (Electron Spin Resonance) analysis of organic materials with Dr. R. B. Pode (Nagpur), Dr. Baldacchini (ENEA, Rome) and Dr. T. K. Gundurao (IIT, Bombay). After his PhD, he started working on the growth of wide band gap nano-structures (ZnO) and their physical (optical & magnetic) properties with the intention that they could be used in electronic devices as nano-composites. For his post-doctoral studies (with Dr. Michele Muccini and his group at ISMN, CNR di Bologna, Italy), he focused on the growth of various organic molecules for light emitting transistors (LET) and opto-electronic characterization of LETs. In 2004, he joined the Department of Chemistry at The University of Hong Kong and he focused on various molecular materials (with Prof. Chi-Ming Che and his group) for electronic device applications.


Keynote Lecture 3: High-precision Polymer Derived Ceramics (PDC) Parts for MEMS and BioMEMS

Juergen Bruggerjuergen2
Microsystems Laboratory, Ecole Polytechnique Fédérale de Lausanne (EPFL), Switzerland

Abstract: Micro- and nanometer precise engineering of olymer-derived polymers (PDC) is presented and discussed for several classes of PDC materials and compared. Process optimization for PDC MEMS and NEMS devices shown in this talk include novel mold filling technique that enable complex geometries at micrometer scale, the scalable fabrication of nanotips, and bio-compatibility assessment of the developed ceramic materials and specimen in view of an use as implantable devices.

Biography: Juergen Brugger is Professor at the Ecole Polytechnique Federale de Lausanne (EPFL), Switzerland in Microengineering and Materials Science. Before joining EPFL he was at the MESA+ Research Institute of Nanotechnology at the University of Twente in the Netherlands, at the IBM Zurich Research Laboratory, and at the Hitachi Central Research Laboratory, in Tokyo, Japan. He received his Master in Physical-Electronics and his PhD degree from Neuchatel University, Switzerland. Since 1995, Dr. Brugger is active in the field of interdisciplinary and experimental micro and nanotechnologies with a focus on novel manufacturing techniques for integrated and multi-functional micro/nanosystems. He currently Speciality Chief Editor of Micro- and Nanoelectromechanical Systems which is a specialty section of Frontiers in Mechanical Engineering. He is also Editorial board member of IEEE-JMEMS.


Keynote Lecture 4: Carbon-based Biomimetic Materials and Functional Manufacturing

Hongzhong Liuhongzhong2
Xi’an Jiaotong University, China

Abstract: Have you seen the soft robotic that can exploiting the interaction with the environment, as observed in the animal model, and can elongate, shorten, bend, and stiffen? Will the robotic that can pass through obstacles in the Terminator come true? All of these peculiar phenomena can be realized using smart materials. Smart materials are the materials at the function of perception and actuation, which possess the ability to change their physical properties (shape, volume, stiffness, viscosity, damping, etc.) in a specific manner in response to external stimulus, such as electric, magnetic, temperature, stress, moisture, pH, etc. With the developments of materials science, smart materials are playing an important role in accomplishing new style of sensing and actuating manners in soft robotics, biomimetic fabrications, drug delivery, tissue engineering and other biomedical applications. However, it is urgent and challengeable in remote control, flexibility and biocompatibility in the research of new smart materials.
Graphene, due to its excellent thermal conductivity, high flexibility, brilliant photothermal conversion efficiency under nIR and good compatibility, is becoming a rising star in the development of carbon nanocomposites based smart composites. Inspired by a bilayer phenomenon that two sheet-like components with different mechanical properties coupled together will attains a shape to facilitate an equilibrium between its constituent elements, a soft smart material is constituted by a bilayer structure, which is composed of pure polydimethylsiloxane (PDMS) layer and a PDMS/GNPs composites layer. The bilayer materials can be driven to bend to the PDMS/GNPs side by light irradiation, as shown in Figure 1a.The excellent reversibility and repeatability in actuation are revealed by sweeping and multicycle light irradiation. It shows that the presented bilayer smart material in various shapes, i.e., fish-like shapes, can float and swim to perspective location in fluid (i.e., water), whose moving directions and velocities can be remotely adjusted by light, indicating an excellent light-actuation ability and well controllability, as shown in Figure 1b. The results may be not only hopeful in developing light-driven drug-delivery platform, but also the bio-robotic microgrippers applying in-vivo and in-vitro.

Biography: Hongzhong Liu received Ph.D degree from Xi’an Jiaotong University (2004). He was an associate professor (2006-2010) and full professor (since 2010) in Xi’an Jiaotong University. He was an advanced visiting scholar in Harvard University (2009-2010).
His group endeavours on the development of nanoimprint process and its applications in high-precision gratings and optoelectronics. Prof. Liu is active in the field of micro/nano fabrication for MEMS, micro fluidics, optoelectronics, precision manufacturing, and flexible electronics. He has published more than 200 technical papers including publications in Advanced Materials, Nano Today, Small, and etc. He has given over 50 Keynote, Plenary and Invited Talks at international conferences and institutions.


Keynote Lecture 5: MEMS Based TSV 3D Integration for Microsystem Applications

Yufeng Jinyufeng2
Beijing University, China

Abstract: Advanced integration technology can greatly boost the performance of next generation MEMS applications from portable electronics, highly sensitive micro-sensors to multi-function microsystems. This talk will present the recent progress on MEMS based TSV (through silicon via) integration technology, with an emphasis on efforts of 3D-TSV group in Peking University. The key TSV technologies were realized and a software was developed to simulate and analyze the DRIE, PECVD and electroplating processes. A 10-layer chips stacking sample was demonstrated using a novel TSV integration approach. Electrical characterizations of TSV were carried out, including DC resistance, leakage current, C-V test as well as high frequency S-parameter testing on TSV-RDL signal path up to 40GHz. Typical applications of 3D TSV integration technology for microsystems will be presented, such as compact inertial sensors, CMOS image sensor, IRFPA, RF MEMS, and 2.5D integrated SRAM.

Biography: Prof. Jin Yufeng received his doctor degree on physical and optical-electronics engineering from Southeast University, China, in Mar. 1999. Since then, he has worked as a post-doctor, associated professor and professor in Institute of Microelectronics and Shenzhen Graduate School of Peking University. He worked in Joining Group of GINTIC/SIMTech, Singapore, as a visiting research fellow from Nov., 2001 to Oct., 2004. He has directed National Key Laboratory of Science and Technology on Micro/Nano Fabrication since 2005. His research interests focus on MEMS sensors, TSV related 3D integration of microsystems and its application systems. During past five years, more than 20 patents have been granted and 40 more papers published on ECTC, ESTC, EPTC and ICEPT, and so on.
His 3D SiP group has established close relationship with INTEL, SAMSUNG, SIMTech,HUAWEI, SMIC, ASTRI, CETC, CASC, etc on development of TSV 3D integration technologies, such as TSV process simulation, key process developing, TSV modeling, design tool for 3D integration.


Keynote Lecture 6: Nanotube Fountain Pens: Towards 3D Printing of Metallic Nanostructures

Lixin Donglixin2
Michigan State University, USA

Abstract: The introduction of additive manufacturing (aka 3D printing) by Chuck Hull of 3D Systems Corp. in the industry marked the advantage of building from bottom up and distributed manufacturing. Printing with metals is treated as the final frontier in 3D printing and has achieved remarkable advancement in recent years. Compared with conventional metal component manufacturing process that usually lasts from weeks to months and lacks dynamics in product design, 3D printers allow the lean manufacturing of the machine parts, indicating a new revolution in the manufacturing industry. The recent progress in the miniaturization of the electromechanical system raises the question that whether the 3D metal printing can be realized at the nanoscale or even atomic level, which is also the core of bottom-up nanomanufacturing. A nanotube fountain pen (NFP) is developed for this purpose. The NFP uses a metal-filled carbon nanotube as a pen-tip injector for “writing” and a reservoir for continuous mass feeding. The deposition of the metal is based on nanofluidic mass flow from the pen-tip nanotube driven by electromigration and the continuous mass feeding is implemented by inter-nanotube mass transport of the encapsulated metals. Nanostructures and devices have been prototyped using this technique including a sphere-on-pillar optical antenna and an elastic and shape-adaptive tip for sliding probe methods. With the potential to serve as a pin for directly writing 3D metallic nanostructures, the NFP will be the key towards the development of a 3D printing system for large scale nanomanufacturing of metallic structures.

Biography: Lixin Dong is an Assistant Professor at Michigan State University. He received the B.S. and M.S. degrees in Mechanical Engineering from Xi’an University of Technology (XUT) in 1989 and 1992, respectively. He became a Research Associate in 1992, a Lecturer in 1995, and an Associate Professor in 1998 at XUT, where he has served as the head of the Department of Mechatronics Engineering from 1997 to 1999. He received his Ph.D. degree in Micro Systems Engineering from Nagoya University in 2003, and became Assistant Professor at Nagoya University in 2003. In 2004 he joined Swiss Federal Institute of Technology (ETH) Zurich as a Research Scientist, and has been a Senior Research Scientist at ETH Zurich from 2005 to 2008, where he led the NanoRobotics Group in the Institute of Robotics and Intelligent Systems (IRIS). His main research interests include nanorobotics, nanoelectromechanical systems (NEMS), and enabling nanomanufacturing technologies for fluidic, photonic, biomedical, and other nanosystems. He received the National Science Foundation Faculty Early Career Development (CAREER) Award in 2011, the IEEE T-ASE Googol Best New Application Paper Award in 2007, and many other awards. He is a senior member of IEEE and serves as a Senior Editor of the IEEE Transactions on Nanotechnology. He is Chair of the Technical Committee (TC) on Nano Energy, Environment and Safety (NEES), IEEE Nanotechnology Council (NTC), a representative of IEEE Robotics and Automation Society in IEEE NTC AdCom (12-), and a representative of IEEE Trans. on Nanotechnology in the Publication Activities Board (PAB), IEEE Robotics and Automation Society (12-).


Keynote Lecture 7: A New Transduction Scheme of Physical Quantity Detection Based on the Mode Localization of Weakly Coupled Resonators

Honglong Changhonglong2
Northwestern Polytechnical University, China

Abstract: MEMS resonators have been researched over several decades. The applications of the resonators have covered the fields from communications, inertial sensors, atomic force microscopy, chemical sensors to medical diagnostics etc. A classical detection method for MEMS sensors is to measure the resonance frequency change caused by the physical quantity. Over the past ten years, a new transduction scheme based on the mode localization of weakly coupled resonators (WCRs) was proposed. The mode localization phenomenon could be described as that in a nearly symmetric WCRs system, the presence of a small symmetry-breaking perturbation on the structure will lead to a vibration energy confinement. Different from the traditional resonant sensors, eigenstates or amplitude ratio rather not the resonance frequency are chosen as the output metrics for such sensors. Using the mode localization, the sensitivity of WCRs based sensors could be enhanced by orders of magnitude compared to traditional resonant sensors.
This talk will review some milestones on this new transduction scheme, and present the first experimental application of the transduction scheme to inertial sensors such as accelerometers and gyroscopes.

Biography: Dr. Honglong Chang is currently a professor at the MEMS Laboratory of Northwestern Polytechnical University (NPU), concurrently he also serves as the department chair of the Department of Microsystems Engineering (DME) since Apr., 2011. He is also an IEEE senior member. From Oct. 2011 to Nov. 2012, he was a Visiting Associate (Faculty) with the Micromachining Laboratory, California Institute of Technology, Pasadena, USA. He has published more than 100 papers in MEMS field.


Keynote Lecture 8: Wall Shear Stress Measurement: From Sensors to Instrumentation

Binghe Mabinhe2
Northwestern Polytechnical University, China

Abstract: Knowledge of wall shear stress, generated for the flow viscous effects, is of both fundamental and practical importance. Miniaturized shear stress sensors fabricated using MEMS technology offer superior spatial resolution, fast time response, and minimized interference with fluid flow. Different types of microsensors are developed and compared. The research activities, including design, fabrication, and packing, are presented. Characterization techniques are also studied both in liquid and in gaseous fluid flows. Applications of aerodynamics or hydrodynamics are introduced finally.

Biography: Binghe MA is Professor and Vice Dean of the School of Mechanical Engineering, at Northwestern Polytechnical University. He is Vice Director of Shaanxi Key Provincial Laboratory of MEMS/NEMS of China. His research interests are microsensor and microsystem technologies for aeronautic applications, especially for flow measurement&control, and design of MEMS. The research group won the second prize of the National Award for Technological Invention 2010.